JPH0215461B2 - - Google Patents

Info

Publication number
JPH0215461B2
JPH0215461B2 JP59228955A JP22895584A JPH0215461B2 JP H0215461 B2 JPH0215461 B2 JP H0215461B2 JP 59228955 A JP59228955 A JP 59228955A JP 22895584 A JP22895584 A JP 22895584A JP H0215461 B2 JPH0215461 B2 JP H0215461B2
Authority
JP
Japan
Prior art keywords
suction
held
substrate
flat
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59228955A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61111251A (ja
Inventor
Masuo Shiaku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KURESEN SANGYO KK
Original Assignee
KURESEN SANGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KURESEN SANGYO KK filed Critical KURESEN SANGYO KK
Priority to JP22895584A priority Critical patent/JPS61111251A/ja
Publication of JPS61111251A publication Critical patent/JPS61111251A/ja
Publication of JPH0215461B2 publication Critical patent/JPH0215461B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/14—Air blasts producing partial vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP22895584A 1984-11-01 1984-11-01 平板状部材の保持装置 Granted JPS61111251A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22895584A JPS61111251A (ja) 1984-11-01 1984-11-01 平板状部材の保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22895584A JPS61111251A (ja) 1984-11-01 1984-11-01 平板状部材の保持装置

Publications (2)

Publication Number Publication Date
JPS61111251A JPS61111251A (ja) 1986-05-29
JPH0215461B2 true JPH0215461B2 (en]) 1990-04-12

Family

ID=16884476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22895584A Granted JPS61111251A (ja) 1984-11-01 1984-11-01 平板状部材の保持装置

Country Status (1)

Country Link
JP (1) JPS61111251A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631647A (ja) * 1986-06-23 1988-01-06 Taiyo Tekko Kk 無接触吸着装置
JP5370664B2 (ja) * 2009-09-07 2013-12-18 村田機械株式会社 基板の移載装置、およびその方法
JP5888891B2 (ja) * 2010-09-27 2016-03-22 東レエンジニアリング株式会社 基板搬送装置
CN111348412B (zh) * 2020-04-27 2025-03-14 聊城市博源节能科技有限公司 一种零部件取料装置
CN114104658A (zh) * 2021-12-14 2022-03-01 常州先进制造技术研究所 一种板材上料自适应控制方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140343A (en) * 1974-09-25 1976-04-05 Ota Toshuki Aruminiumuno hyomenshoriho
JPS5742405Y2 (en]) * 1976-09-08 1982-09-18
JPS58143989A (ja) * 1982-02-15 1983-08-26 株式会社日立製作所 搬送装置

Also Published As

Publication number Publication date
JPS61111251A (ja) 1986-05-29

Similar Documents

Publication Publication Date Title
US5067762A (en) Non-contact conveying device
US7597370B2 (en) Carrying unit
EP0201240B1 (en) Apparatus for supporting and/or conveying a plate with fluid without physical contact
JP5110480B2 (ja) 非接触搬送装置
JP5921323B2 (ja) 搬送保持具及び搬送保持装置
WO2005076342A1 (ja) 非接触搬送装置
JP2024026194A (ja) ウエハ搬送装置
JPH0215461B2 (en])
JPH08330383A (ja) 基板受渡し装置
JPS6221237A (ja) ウエハ位置決め用テ−ブル
JPH0372423B2 (en])
WO2002047155A1 (fr) Support
JP3383739B2 (ja) ワーク保持装置
JPS62211236A (ja) 板状体の保持装置
JP2747518B2 (ja) ウエーハのハンドリング装置
JPH05299492A (ja) ウエハの位置決め装置
JP2003245885A (ja) 搬送装置
JPS5943819B2 (ja) 露光装置
JPH0512113B2 (en])
JP6716136B2 (ja) 流体流形成体及び非接触搬送装置
JP2002280439A (ja) 搬送装置
JPH02138044A (ja) 板状体の保持装置
JPH02305740A (ja) 基板搬送装置
JPH05335404A (ja) 無接触保持装置
JPH05112240A (ja) 搬送装置